Capacitive displacement sensors at a glance

capaNCDT

Capacitive displacement sensors from Micro-Epsilon are available in different designs and versions. The sensors are differentiated by their measuring range, their design and by the technology used to manufacture them. The capacitive sensors are available in a cylindrical design (with integrated cable or socket) or as flat sensors (with integrated cable). Replacing the sensors can be executed without requiring any recalibration and within short time. Most of the sensors can be used in clean rooms and in ultra-high vacuums.

Click on the respective category to obtain further information about capacitive sensors.

CS = capa Sensor
HP = High Precision

Detail

info-40px Please move your mouse over the table to show more detailed information.

CS005

CAD Ansicht
Weight: 2 g
Разрешение: 0,0375 nm *
Линейность: 0,15 мкм *
Temperature stability sensitivity: -0,5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS02

CAD Ansicht
Weight: 2 g
Разрешение: 0,15 nm *
Линейность: 0,04 мкм *
Temperature stability sensitivity: -2 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS05

CAD Ansicht
Weight: 4 g
Разрешение: 0,375 nm *
Линейность: 0,5 мкм *
Temperature stability sensitivity: -5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE05

CAD Ansicht
Weight: 2 g
Разрешение: 0,375 nm *
Линейность: 0,15 мкм *
Temperature stability sensitivity: -5 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS08

CAD Ansicht
Weight: 7 g
Разрешение: 0,6 nm *
Линейность: 0,4 мкм *
Temperature stability sensitivity: -8 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS1

CAD Ansicht
Weight: 8 g
Разрешение: 0,75 nm *
Линейность: 1,5 мкм *
Temperature stability sensitivity: -32 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS1HP

CAD Ansicht
Weight: 8 g
Разрешение: 0,75 nm *
Линейность: 1,5 мкм *
Temperature stability sensitivity: -10 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE1

CAD Ansicht
Weight: 3,5 g
Разрешение: 0,75 nm *
Линейность: 2 мкм *
Temperature stability sensitivity: -10 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS2

CAD Ansicht
Weight: 50 g
Разрешение: 1,5 nm *
Линейность: 1 мкм *
Temperature stability sensitivity: -64 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CSE2

CAD Ansicht
Weight: 20 g
Разрешение: 1,5 nm *
Линейность: 2,6 мкм *
Temperature stability sensitivity: -64 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS3

CAD Ansicht
Weight: 70 g
Разрешение: 2,25 nm *
Линейность: 0,9 мкм *
Temperature stability sensitivity: -96 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS5

CAD Ansicht
Weight: 95 g
Разрешение: 3,75 nm *
Линейность: 2,5 мкм *
Temperature stability sensitivity: -160 nm/°C
Operating temperature max.: +200 °C
* depends on controller unit

CS10

CAD Ansicht
Weight: 180 g
Разрешение: 7,5 nm *
Линейность: 15 мкм *
Temperature stability sensitivity: -320 nm/ppm/°C
Operating temperature max.: +200 °C
* depends on controller unit
CSH = capa Sensor Hybrid

Detail

info-40px Please move your mouse over the table to show more detailed information.

CSH02-CAm1,4

CAD Ansicht
Weight: 30 g
Разрешение: 0,15 nm *
Линейность: 0,054 мкм *
Temperature stability sensitivity: -2,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH05-CAm1,4

CAD Ansicht
Weight: 30 g
Разрешение: 0,38 nm *
Линейность: 0,13 мкм *
Temperature stability sensitivity: -6 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1-CAm1,4

CAD Ansicht
Weight: 33 g
Разрешение: 0,75 nm *
Линейность: 0,13 мкм *
Temperature stability sensitivity: -12 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1,2-CAm1,4

CAD Ansicht
Weight: 33 g
Разрешение: 0,9 nm *
Линейность: 0,84 мкм *
Temperature stability sensitivity: -14,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH2-CAm1,4

CAD Ansicht
Weight: 38 g
Разрешение: 1,5 nm *
Линейность: 0,5 мкм *
Temperature stability sensitivity: -24 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit
CSH = capa Sensor Hybrid
FL = Flat Design

Detail

info-40px Please move your mouse over the table to show more detailed information.

CSH02FL-CRm1,4

CAD Ansicht
Weight: 28 g
Разрешение: 0,15 nm *
Линейность: 0,05 мкм *
Temperature stability sensitivity: -2,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH05FL-CRm1,4

CAD Ansicht
Weight: 28 g
Разрешение: 0,38 nm *
Линейность: 0,09 мкм *
Temperature stability sensitivity: -6 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1FL-CRm1,4

CAD Ansicht
Weight: 30 g
Разрешение: 0,75 nm *
Линейность: 0,2 мкм *
Temperature stability sensitivity: -12 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH1,2FL-CRm1,4

CAD Ansicht
Weight: 30 g
Разрешение: 0,9 nm *
Линейность: 0,84 мкм *
Temperature stability sensitivity: -14,4 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit

CSH2FL-CRm1,4

CAD Ansicht
Weight: 36 g
Разрешение: 1,5 nm *
Линейность: 0,32 мкм *
Temperature stability sensitivity: -24 nm/°C
Operating temperature max.: +200 °C
Cable length: 1,4 m
* depends on controller unit
CSG = capa Sensor Gap

Detail

info-40px Please move your mouse over the table to show more detailed information.

CSG0,50-CAm2,0

CAD Ansicht
Weight: 77 g
Разрешение: 4 nm *
Линейность: 0,5 мкм *
* depends on controller unit

CSG1,0-CAm2,0

CAD Ansicht
Weight: 77 g
Разрешение: 8 nm *
Линейность: 1 мкм *
* depends on controller unit
info@sensorica-m.ru